Foreign body inspection device and foreign body inspection method

摘要

For example, the presence of foreign matter on the surface of the object to be detected such as a reticle with high accuracy and reliably.;The foreign object inspection apparatus comprises: (1) a laser light source 1 for calculating a laser light having an interference distance of 1 km or more, (2) scanning the surface of the inspected object 71 with this laser light, (C) a light detecting device 60 for detecting the light reflected and diffracted at the surface of the inspected object 71, (d) an inspected object 71 placed in a predetermined direction , And (E) a gas supply means (80) for bringing the atmosphere in which the inspected object (71) is arranged into a high purity inert gas atmosphere. In the foreign substance inspection method, the atmosphere in which the inspected object is disposed is set to a high purity inert gas atmosphere, and while moving the inspected object in a predetermined direction, the surface of the inspected object with the laser light having the wavelength And detects light reflected and diffracted on the surface thereof to detect foreign matter present on the surface of the object to be inspected.