How to measure the flatness and straightness by the minimum zone method

摘要

The present invention relates to a flatness and a straight edge of a platen used in a precision measuring room and a machine room, a method of measuring straightness of a conveying body such as a machine tool and a measuring instrument, The purpose of this paper is to measure the flatness and straightness from the minimum area by the method.;In the present invention, the average surface is obtained from the height data (Zi) of the measured plane coordinates (Xi, Yi) by the least squares method and the coordinates are transformed to obtain the maximum height data point P_One) And the minimum height data point (P₂), And then the first rotation point P_One, P₂Axis, finds the minimum area for the X-axis, checks the sign for the selected points, and proceeds to the next step if it is a contradictory sign. If not, the new point P₃P₂And then the coordinate is transformed with respect to the minimum area plane for the X-axis, and the minimum area plane for the Y-axis is obtained by the above-described method. Then, The method of measuring the degree of flatness with the data difference that is farthest from the top and the bottom in the vertical direction with respect to the minimum area plane by coordinate transformation and the method of measuring the straightness by a process similar to the above-The method of measuring straightness shall be the point.