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METHOD amp; DEVICE FOR A FORMATION OF A GRANULAR THIN FILM USING A VACUUM THERMAL EVAPORATION AND SPUTTERING
METHOD amp; DEVICE FOR A FORMATION OF A GRANULAR THIN FILM USING A VACUUM THERMAL EVAPORATION AND SPUTTERING
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机译:利用真空热蒸发和溅射形成颗粒状薄膜的方法和装置
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摘要
This invention relates to the method for forming fine granula thin film using vacuum heat deposition, describes the method comprising the steps of forming a first material by vacuum heat deposition wherein the pressure in the reacting chamber remains a first pressure not forming plasma for sputtering; and spreading a second material with granular shape in the first material by sputtering method wherein the pressure in the reacting chamber remains a second pressure forming plasma for sputtering.
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