Ion implanter with door interlock status indicator

摘要

In this study, several anti-theft devices (500-800) andSince most of the above door lock switching means (500-800) are closed, on the ion implant teeth with high voltage relay means (1100) that can generate ion beam,According to the state of each door interaction means (500-800), a plurality of interactive state display tools (100-400) are added to display the door lock state,It can accurately measure the internal state of the doorway in a short time and reduce the maintenance time of the equipment,Simple verification of bad phenomena in equipment,This is about the ion implant teeth with the special effect of the door lock state identification device to prevent safety accidents.