Crystallization Method of Thin Films for Thermochromic Smart Windows

摘要

Thin film used as a coating material for thermochromic smart windows that maintains the intelligence to save electrical energy by blocking the near infrared rays in summer when the temperature rises due to the change of the external infrared ray and blocking the increase of the indoor temperature. After the silver thin film is manufactured, the thin film must be crystallized to show the thermochromic effect. Therefore, the conventional method of heating the substrate using a long time-consuming argon gas affects the stoichimetry of the thin film. Avoiding uncertain methods and applying Rapid Thermal Annealing (RTA) or Rapid Thermal Processing (RTP) methods to these thermochromic thin films, they do not require argon gas in a very short time and do not affect the stoichiometry of the manufactured thin film. By making it possible to produce thin films with reliable crystallinity Crystallization method of the thermopile electrochromic smart window layer for for producing a thermopile electrochromic smart window having a difference.