METHOD OF MANUFACTURE OF THIN-FILM SENSOR FOR ANALYSIS OF AMMONIA IN GAS ATMOSPHERE

摘要

FIELD: electronics, sensory equipment. SUBSTANCE: invention is directed at increased sensitivity of thin-film sensor while analyzing concentration of ammonia in air and at simplification of manufacturing technology. layer of chemically purified phtalocianine of copper not exceeding 50 nm in thickness is deposited on substrate with electrodes and is subjected to doping with oxygen of air. EFFECT: increased sensitivity , simplified manufacturing technology in fabrication of inexpensive and reliable sensors.