A process for the purification of the exit window of a pulsed laser beam and apparatus for carrying out the method

摘要

The invention concerns a method of cleaning the outlet window (4) of a pulsed laser beam, wherein a water jet (6) is directed onto the outlet window (4). In order to develop a method in which high laser energy for the removal process can be transmitted during periodic cleaning of the outlet window (4), the direction of the water jet (6) is variable. In the pause between two laser pulses the water jet (6) is directed onto the outlet window (4) and away therefrom during a laser pulse.