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A piezoelectric / electrostrictive film containing a piezoelectric / electrostrictive drive
A piezoelectric / electrostrictive film containing a piezoelectric / electrostrictive drive
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机译:包含压电/电致伸缩驱动器的压电/电致伸缩膜
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摘要
A piezoelectric/electrostrictive actuator including a ceramic substrate (2), and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.
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