Method of evaluating the lifetime of a semiconducting material and a device for implementing this process óoeuvre.

摘要

The invention relates to a method for evaluating the lifetime of a semiconducting material and a device for implementing this method. & br / this method to evaluate the lifetime of a semiconductor material (6) consists of: send (1) with a slot of short wavelength on the surface of this material, which causes the production of carriers; spraying (with 3 and 4) an electromagnetic wave in a range of wavelengths less than or equal to 1 millimeter on the surface; be measured (in 5) the reflected wave in order to obtain a curve of the fading of the carriers created; and (5) in the service life on the basis of this curve. & br / application in particular to the manufacture of semiconductor devices.