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PARTICLE MICROCOLLIMATION DEVICE, PARTICLE DETECTION DETECTOR AND METHOD, MANUFACTURING METHOD AND USE OF THE MICROCOLLIMATION DEVICE
PARTICLE MICROCOLLIMATION DEVICE, PARTICLE DETECTION DETECTOR AND METHOD, MANUFACTURING METHOD AND USE OF THE MICROCOLLIMATION DEVICE
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机译:微粒集聚装置,微粒检测装置和方法,制造方法以及微粒集聚装置的使用
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摘要
The present invention relates in particular to a device for microcollimation of incident particles consisting of a set of microholes of size of the order of one micrometer, randomly drilled, but oriented in parallel, in an insulating sheet of thickness between a few micrometers and several millimeters. The present invention also relates to a detector and a method of detecting particles, and a method of manufacturing and using said microcollimation device.
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