首页>
外国专利>
Torsion beam accelerometer with slotted tilt plate
Torsion beam accelerometer with slotted tilt plate
展开▼
机译:带开槽倾斜板的扭力梁加速度计
展开▼
页面导航
摘要
著录项
相似文献
摘要
A capacitive-type torsion beam accelerometer sensor element exhibiting improved stability contains slots in the heavy side of the rotatable sensing element which serve to alter the geometry of the heavy side capacitor such that the electrical geometry substantially coincides with the physical geometry of the substrate's fixed conductive plate in the presence of charge spreading. The slots also permit ingress and egress of air, thus extending the frequency response.
展开▼