首页> 外国专利> Ballistic charge transport device with integral active contaminant absorption means

Ballistic charge transport device with integral active contaminant absorption means

机译:具有整体式主动污染物吸收装置的弹道电荷传输装置

摘要

A ballistic charge transport device including an edge electron emitter defining an elongated central opening therethrough with a receiving terminal (e.g. an anode) at one end of the opening and a getter at the other end. A suitable potential is applied between the emitter and the receiving terminal to attract emitted electrons to the receiving terminal and a different suitable potential is applied between the emitter and the getter so that contaminants, such as ions and other undesirable particles, are accelerated toward and absorbed by the getter.
机译:一种弹道电荷传输装置,包括边缘电子发射器,该边缘电子发射器限定了穿过其中的细长的中心开口,在该开口的一端具有接收端子(例如阳极),而在另一端具有吸气剂。在发射器和接收端子之间施加合适的电势以将发射的电子吸引到接收端子,并且在发射器和吸气剂之间施加不同的合适电势,以使污染物(例如离子和其他不良粒子)被加速并吸收由吸气剂。

著录项

  • 公开/公告号US5502348A

    专利类型

  • 公开/公告日1996-03-26

    原文格式PDF

  • 申请/专利权人 MOTOROLA INC.;

    申请/专利号US19930169232

  • 申请日1993-12-20

  • 分类号H01J1/46;H01J17/24;H01L29/06;H01L23/58;

  • 国家 US

  • 入库时间 2022-08-22 03:38:53

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