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Method for forming improved H.sub.2 -permselective oxide membranes using temporary carbon barriers

机译:使用临时碳阻挡层形成改进的H2-亚选择性氧化膜的方法

摘要

A method of forming inorganic membranes which are highly selective to permeation of hydrogen by temporarily forming a carbon barrier in the pores of a porous substrate, followed by chemical deposition of SiO.sub.2, B.sub.2 O.sub.3, TiO.sub.2, Al.sub.2 O.sub.3 and mixtures thereof in the pores, followed by removal of the carbon barrier. It has been demonstrated that the permeation selective layers thusly formed by this invention have a five fold increase in permeance over such layers made by a similar method but without forming a temporary carbon barrier in the pores of the porous substrate, and removal of the carbon- barrier after establishment of the oxide membrane. Some suitable porous substrate are Vycor™ glass or Al.sub.2 O.sub.3.
机译:一种形成无机膜的方法,该膜对氢的渗透具有高度选择性,方法是在多孔基材的孔中暂时形成碳阻挡层,然后化学沉积SiO2,B.2O.3,在孔中加入TiO2,Al2O3及其混合物,然后去除碳阻挡层。已经证明,通过本发明形成的渗透选择层的渗透率比通过类似方法制得的这种层的渗透率增加了五倍,但是没有在多孔基材的孔中形成临时的碳阻挡层,并且没有除去碳。氧化膜建立后的屏障。一些合适的多孔基底是Vycor TM玻璃或Al 2 O 3。

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