Mechanical shutter for protecting an x-ray detector against high- energy electron or x-ray damage

摘要

A pass-through shutter mechanism enables the semiconductor crystal of an energy dispersive x-ray detector to extend beyond the shutter mechanism for analysis, adjacent to the sample, achieving optimum solid angle collection efficiency. The shutter mechanism provides optimum protection of the semiconductor detector crystal from high energy x-ray or secondary electron events produced in the chambers of electron microscopes, microprobes, x-ray spectrometers, etc.