PROBLEM TO BE SOLVED: To provide a higher sensitive photoelectric emission surface having an active layer dissolving crystal defects and an electronic tube having the photoelectric emission surface. ;SOLUTION: On the photoelectron emission surface, an epitaxial layer formed by laminating a window layer 31 consisting of (AlyGa1-y)x'In1-xP and an active layer 32 consisting of GaxIn1-xP in that order is closely provided through an antireflection film 20 on a glass face plate 10. A very thin surface layer 33 consisting of Cs2O and an electrode 40 consisting of Cr and formed on the upper surface of the active layer 32 at the central part and the peripheral edge part. Crystal defects are dissolved in the active layer 32 in a range of an atomic composition ratio x of 0x≤0.75, almost equal to the atomic composition ratio X' of the window layer, lengthening the diffusion length of a photoelectron generated by directing light to be detected, an object for detection, in the active layer 32. Thus, the photoelectric emission surface comes to higher sensitivity rather than conventional sensitivity. An electronic tube using the photoelectric emission surface detects weaker light rather than conventional light.;COPYRIGHT: (C)1997,JPO
展开▼
机译:解决的问题:提供具有溶解晶体缺陷的活性层的更高灵敏度的光电发射表面和具有光电发射表面的电子管。 ;解决方案:在光电子发射表面上,外延层是通过层叠由(Al y Sub> Ga 1-y Sub>) x Sub组成的窗口层31形成的>'In 1-x Sub> P和依次由Ga x Sub> In 1-x Sub> P组成的有源层32在玻璃面板10上的防反射膜20。在中央部的活性层32的上表面形成有由Cs 2 Sub> O构成的非常薄的表面层33和由Cr构成的电极40。和外围边缘部分。晶体缺陷以0 <x≤0.75的原子组成比x几乎等于窗口层的原子组成比X′的范围溶解在有源层32中,从而延长了通过引导光而产生的光电子的扩散长度。在有源层32中被检测到的被检测物即检测对象。因此,光电发射表面具有比传统灵敏度更高的灵敏度。使用光电发射表面的电子管可检测到比传统光弱的光。;版权所有:(C)1997,JPO
展开▼