VACUUM DEPOSITION METHOD OF OPTICAL PARTS USING POROUS CERAMIC SINTERED COMPACT IMPREGNATED AND SOLIDIFIED WITH ORGANIC FILM FORMING MATERIAL FOR OPTICAL PARTS

摘要

PROBLEM TO BE SOLVED: To form an organic protective film on optical part by heating a porous ceramic sintered compact impregnated and solidified with an organic film forming material in vacuum to vapor deposit and solidify the film forming material without using any solvent. ;SOLUTION: The optical parts are treated with an inorganic material to be deposited by evaporation by vacuum deposition in a vacuum deposition device. The porous ceramic sintered compact impregnated and solidified with the organic film forming material for optical parts, which is capable of evaporating in vacuum, is heated in the device as it is. As the organic film forming material, for example, a polyethylene wax and a silicone resin compound are preferably exemplified. As a result, the organic protective film is formed by sticking the evaporated film forming material on the surface of the optical parts, to which the inorganic material is vapor deposited and which has fine ruggedness.;COPYRIGHT: (C)1997,JPO