PROBLEM TO BE SOLVED: To preclude a cutting accuracy from getting worse or the like due to the variation of atmospheric pressure by preventing the atmospheric pressure within the cover case for housing a chuck body from changing during the period of cutting an ingot into wafers. ;SOLUTION: A fan is installed at the air outlet of a cover case for covering the periphery of a blade 16, and an airflow meter 36 is provided at the air outlet side of the fan 32. Air capacity passing through the air outlet 30 is detected by means of the air flow meter sensor 36, then a rotation speed of the fan 32 is controlled to keep the air capacity constant. In this operation, the atmospheric pressure within the cover case 28 is maintained constant, and a cutting accuracy can be prevented form getting worse or the like due to atmospheric pressure changes.;COPYRIGHT: (C)1997,JPO
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