METHOD AND DEVICE FOR QUANTITATIVE DETERMINATION IN TOTAL REFLECTION X-RAY FLUORESCENCE ANALYSIS

摘要

PURPOSE: To enable quantitative determinations to be stably made without using a standard sample and being affected by changes in intensity of an irradiation X-ray by quantitatively determining the concentration of an element to be measured, using the fluorescent X-ray relative sensitivity coefficient of the element to be measured and an element of known concentration and shape other than the element to be measured and using either X-ray penetration length or X-ray reflectance. ;CONSTITUTION: It is determined whether the distribution state of an element to be measured shows particle-like contamination, surface contamination, or internal contamination (exponentially diffusing contamination), from changes in X-ray fluorescence intensity when the incidence angle of an irradiation X-ray is varied, and a concentration determining method suited for the shape of that impurity is applied as follows, that is, using the fluorescent X-ray intensity of the element to be measured which emanates from a sample to be measured and using the fluorescent X-ray intensity of an element of known concentration and shape other than the element to be measured, the relative sensitivity coefficient of the element to be measured and the latter element and either X-ray penetration length or X-ray reflectance are calculated, and the use of these in determining the concentration of the element to be measured results in accurate analysis.;COPYRIGHT: (C)1996,JPO