FORMATION OF RECTIFYING ELECTRODE FOR DIAMOND

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a rectifying electrode for diamond in an electronic device which operates even in a high-temperature environment and is made of semiconductor diamond. ;SOLUTION: First, a metal for an oxygen getter is vapor-deposited on oxygen-terminated diamond to form an electrode. Then it is heat-treated at least 300°C for at least one minute. An electrode metal has an electrical negativity of at most 1.8 and an Mg, Hf or Zr can be used therefor, for example. In addition, the diamond is made of semiconductor diamond doped with boron, and it is also formed by laminating the semiconductor diamond and undoped diamond.;COPYRIGHT: (C)1997,JPO