OZONE DECOMPOSING EQUIPMENT, AND ULTRAVIOLET RAY ABSORBING TYPE OZONE GAUGE

摘要

PURPOSE: To provide an ozone decomposing unit capable of supplying a sample gas in which ozone is specifically decomposed by arranging a metal compound having reduction type optical responding semiconductor characteristic in the state where the sample gas can make contact. ;CONSTITUTION: A member 12 containing a metal compound having reduction type optical responding semiconductor characteristic is filled in the hollow member 11 of an ozone decomposing unit 10. The hollow member 11 is filled with a sample gas introduced from a sample gas inlet port 13. The exciting light for the metal compound having reduction type optical responding semiconductor characteristic of the member 12 is emitted from an exciting light source 14 toward the member 12. The ozone in the sample gas is reduced and decomposed by free electrons generated by the excitation of the metal compound by the emission of the exciting light. After reduction and decomposition, the sample gas in which the ozone was decomposed is collected from a sample gas outlet port 13'. The material of the hollow member 11 is not particularly limited, if it has such an airtightness that the replacement of the internal and external materials can be prevented, and transmits the exciting light.;COPYRIGHT: (C)1996,JPO