CUTTING TEST METHOD BY SCANNING ELECTRON MICROSCOPE WITH CUTTING MECHANISM, AND SCANNING ELECTRON MICROSCOPE WITH CUTTING MECHANISM

摘要

PROBLEM TO BE SOLVED: To quickly and uniformly heat a cut test piece in a short time as much as possible by integrating a non-cut test piece and a water cooled direct current-carrying electrode into the cut test piece. ;SOLUTION: A low-voltage large-current dc power source is connected to a water cooled direct current-carrying electrode 7 for heating a cut test piece 1, and the low-voltage large-current dc power source is controlled so as to heat the cut test piece 1 to a specified temperature by a temperature controller. The controlled heating temperature of the cut test piece 1 is detected by a temperature detecting thermocouple, measured by the temperature controller, and recorded by a recorder. The low-voltage large-current DC power source can be current-controlled by a controlling personal computer through the temperature controller, and the heating temperature of the cut test piece 1 can be optionally set.;COPYRIGHT: (C)1997,JPO