LITHIUM NIOBATE THIN FILM FROM WATER-BASED PRECURSOR SOLUTION AND PREPARATION OF LITHIUM NIOBATE THIN FILM WITH SOLID SOLUBILIZED TITANIUM

摘要

PROBLEM TO BE SOLVED: To obtain a thin film capable of being easily treated in the air at a low temperature and excellent in characteristics by refluxing complex alkoxide solution by adding decarboxylated water and heat treating a thin gel film from the water-based precursor solution. ;SOLUTION: This production process of a lithium niobate thin film from a water- based precursor solution, in the case where titanium is not solid solubilized, comprises mixing LiOEt(lithium ethoxide) with equimolar Nb(OEt)₅(niobium ethoxide) in absolute alcohol, refluxing the mixture to obtain LiNb(EtO)₆(lithium-niobium complex alkoxide) solution, completely hydrolyzing the complex alkoxide by adding 7.5 times mole of H₂O(decarboxylated water), removing ethanol from the ethanol solution containing LiNb(OH)₆(lithium-niobium hydroxide) precipitation produced by continuous refluxing at about 80°C, dissolving the precipitate in decarboxylated water, concentrating the solution and obtaining a precursor solution, and in the case where titanium is solid solubilized, a portion of niobium ethoxide is replaced by Ti(OEt)₄ and the obtained aqueous solution is coated on a base plate to obtain a gel film, which is heated at 200-600°C.;COPYRIGHT: (C)1997,JPO