SILICA GLASS-NATURED THERMAL INSULATING MATERIAL AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To obtain the subject thermal insulating material with no dusting, excellent in thermal insulation, and esp. suitable for the high-temperature heat treatment of semiconductor production equipment. ;SOLUTION: This thermal insulating material lies on the inner surface of a closed vessel made of silica glass and is made up of thermal insulating material units each with graphite layer oriented by making the C-axis direction of its crystal structure coincide with the perpendicular direction of the inner surface. It is preferable that a plurality of the thermal insulating material units be connectedly supported on a silica glass material, specifiedly spaced to one another and assembled in tiers, and also the closed vessel is Pref. kept at reduced. pressures. This thermal insulating material is obtained by the following process: a hydrocarbon gas is introduced into and allowed to flow through a vessel made of silica glass and having a gas inlet and a vent and heated to form graphite layer on the inner surface of the vessel through thermal decomposition of the hydrocarbon followed by sealing both the inlet and vent.;COPYRIGHT: (C)1997,JPO