ECR MICROWAVE PLASMA CVD DEVICE

摘要

PROBLEM TO BE SOLVED: To provide technology by which, even if a film is continuously formed to a long sized one such as a magnetic tape, the film thickness and film quality remain unchanged. ;SOLUTION: This ECR microwave plasma CVD device is provided with a magnetic field generating means, a microwave generating means, a waveguide 3 for microwaves, a plasma reaction tube 1, a window 4 provided between the microwave waveguide 3 and the plasma reaction tube 1 and a feeding means feeding a film forming material to the inside of the plasma reaction tube. Then, a plasma generating means for cleaning is provided near the window.;COPYRIGHT: (C)1997,JPO