RF PLASMA POWER SOURCE COMBINED WITH TECHNOLOGY FOR ENHANCING STABILITY

摘要

PROBLEM TO BE SOLVED: To make execution easy and prevent instability caused by oscillation generating in an RF power supply device for supplying power especially to plasma by adding a phase moving element in addition to a splitter, an amplifier, and a coupler. SOLUTION: A splitter 62 has an input line PIN for accepting an RF signal, and first and second output lines for transmitting first and second output signals introduced from the RF signal. The first output line has an amplifier 60a and phase moving elements 72, 74. The second output line has a power amplifier 60b. A coupler 64 having a first input accepting a first induction signal and a second input accepting a second induction signal couples the first and second induction signals to generate an output signal PFWD. The moving element 74 is connected to between the amplifier 60a and the coupler 64, and relatively conducts phase movement of a signal passing from the amplifier 60a to the coupler against a signal passing from the amplifier 60b to the coupler 64.