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PRODUCTION OF COMPOUND SEMICONDUCTOR CRYSTAL, STORING AND TRANSPORTING METHOD OF LIQUID GALLIUM, AND HOUSING CONTAINER OF LIQUID GALLIUM
PRODUCTION OF COMPOUND SEMICONDUCTOR CRYSTAL, STORING AND TRANSPORTING METHOD OF LIQUID GALLIUM, AND HOUSING CONTAINER OF LIQUID GALLIUM
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机译:复合半导体晶体的生产,液态镓的储存和运输方法以及液态镓的容器
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摘要
PROBLEM TO BE SOLVED: To supply low-cost high purity gallium having excellent handling property for storage and transportation and to produce a III-V compd. semiconductor crystal of high purity. ;SOLUTION: Highly refined gallium is melted and housed in a container 2 to house liquid gallium and maintained at 0 to 80°C. The container 2 for liquid gallium consists of a funnel-like 'Teflon (R)' resin container body 3 and a foamed polystyrene heat-insulating material 5 which surrounds the container body 3 and insulates and keeps the gallium 1 as a liquid state. After the liquid gallium 1 is housed in the container body 3, the space in the container body 3 is filled with nitrogen gas 6 and sealed. In this state, the gallium in a liquid state can be stored and transported and used as in a liquid state as the source material for a compd. semiconductor crystal without solidification to the final stage.;COPYRIGHT: (C)1997,JPO
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