NFM INTEGRATED TYPE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To conduct, on occasion, the observation of the whole sample and NFM observation like light-visual-field observation and phase difference observation. SOLUTION: This microscope has an NFM probe N, a 1st light convergence system for converging luminous flux of the center part of illumination luminous flux from a light source S on the incidence end of the NFM probe N, and a 2nd light convergence system which converges luminous flux of the peripheral part of the illumination luminous flux from the light source S on the sample. An NFM observation image formed on the basis of intensity information on the light from the sample O corresponding to the illumination light emitted from the pointed end of the NFM probe N is observed and an observation image of the whole sample formed on the basis of the light from the sample O corresponding to the illumination light converged on the sample O is observed.