PROBE CARD MOUNTING MECHANISM, MOVING MEMBER TO BE USED IN THE SAME, AND PROBER HAVING THE PROBE CARD MOUNTING MECHANISM

摘要

PURPOSE: To provide a probe card mounting mechanism which does not necessitate components of high precision and is excellent in maintainability, durability and cleanness. ;CONSTITUTION: A probe card mounting mechanism 30 which mounts a probe card on a prober for inspecting the electric characteristics of a semiconductor wafer is equipped with a rotary ring member 31 for engaging a probe card, and an elevating mechanism 32 which moves a probe card 40 engaged by the rotary ring member 31 between an inspection position and a retreat position. The elevating mechanism has a moving member 34 constituted of a hollow elastic body and a gas supplying mechanism 38 for supplying gas to the moving member. The probe card 40 is moved from the retreat position to the inspection position by expanding the moving member 34 with the gas supplied to the inside of the moving member 34.;COPYRIGHT: (C)1997,JPO