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Carbon-coated barrier films with increased concentration of tetrahedrally-coordinated carbon
Carbon-coated barrier films with increased concentration of tetrahedrally-coordinated carbon
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机译:四面配位碳的浓度增加的碳涂层阻挡膜
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摘要
Carbon is deposited on a substrate through plasma enhanced chemical vapor deposition of a decomposable processor containing a seed material additive. The seed material is a hydrocarbon having a high concentration of sp3 tetrahedrally-coordinated carbon. The seed material provides a template for the replication of sp3 tetrahedrally-coordinated carbon atoms in the deposited amorphous carbon coating.
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