METHOD OF ORIENTATION TREATMENT OF ORIENTATION FILM AND APPARATUS OF ORIENTATION TREATMENT OF ORIENTATION FILM

摘要

In a method and an apparatus of orientation treatmentof an orientation film according to the present invention, thesurface of a orientation film formed on a substrate fororientating liquid-crystal molecules is rubbed in apredetermined direction. Thereafter ion beams are radiatedonto the orientation film in a vacuum in a direction differentfrom the rubbing direction, that is, in the direction obliquelyabove the orientation film surface. In the method, these stepscan be reversed.