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Method and device for error correction of acousto-optic light beam deflection, in particular of laserlight
Method and device for error correction of acousto-optic light beam deflection, in particular of laserlight
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机译:用于纠错声光光束,特别是激光的光束的方法和装置
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摘要
A method and a device for compensating wavefront errors in an acousto-optic light-deflecting device having at least one auxiliary deflecting means (28), which generates a deflective light bundle with a geometry independent of the angle of deflection, and acts in a manner opposed to the dependence of the width of the deflected light bundle on the angle of deflection. Examples of such an auxiliary deflecting means are an inclined end surface of the light-deflecting device (34), a prism (35), a plate having diffraction microstructures (36) and a decentred cylindrical lens (37). IMAGE
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