Process for the abatement of propylene carbonate emissions

摘要

Disclosed is a method of removing propylene carbonate developer or stripper fumes arising from the photolithographic circuitization of electronic circuit packages. In the fabrication of electronic circuit packages, photoresist is deposited on the circuit package substrate. The photoresist is imaged and developed, the package substrate circuitized, and the remaining photoresist is stripped. Propylenecarbonate is used as either or both of the developer or the stripper. Even though it has a low vapor pressure and a high boiling point, the nature of the photolithographic process is such that gaseous propylenecarbonate is evolved during fabrication of the electronic circuit package. The process includes the subsequent step of removing the propylene carbonate bearing gas, as air, from the process, and passing the propylene carbonate bearing gas (12) through an aqueous alkaline liquid (13) in a scrubber (21) to scrub the propylene carbonate from the gas. The scrubbed air (15), substantially free of carbonate, is recovered from the process.