A method for producing a precise semiconductor alloy composition from input variables under nonlinear incorporation conditions

摘要

A process for manufacturing precise alloy compositions in nonlinear alloy systems. The invention implements a new quadratic fitting function that relates alloy composition c_A for a variable A to input fluxes f_A and f_B, as c_A=f_A²/(f_A²+βf_B²). β is a parameter that is used to modify the incorporation of the Group V input variable B. This modification is necessary because of different surface populations of Group V dimer species. This new fitting function precisely predicts alloy compositions in nonlinear systems, such as the GaAs_1-yP_y, system, where y is set equal to the composition c_A.