Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane

摘要

the invention relates to a process for separating a gaseous hydride or a mixture of gaseous hydrides, not including the silane, a gaseous medium containing at least one gas from the group formed by hu2082, ar, he, according to which the gaseous medium is passed to a membrane module (1) to (6).in order to get out of the concentration of said module, said mixture of hydrides and hydride is higher than its concentration in the gaseous medium.