Method for sealing fabrication-related openings in micromachined accelerometers

摘要

A method is proposed by means of which openings or cutouts (16, 17) which are used for the purpose of leading conductor tracks out of the oscillation chamber (5) of an accelerometer (1) in a manner preventing short circuits can be sealed in a gas-tight fashion in a simple way. The conductor tracks represent the conductive connection between terminal contacts (13, 14, 15), accessible from outside, of the accelerometer (1) having electrodes (11, 12), which are assigned on both sides to the oscillating mass (7), likewise constructed as an electrode, of the accelerometer (1). The method proposes to use an adhesive which can be cured by means of light, in particular UV light. A defined quantity of the adhesive is applied at a specific point (23) of the accelerometer (1), and after an experimentally determined residence time, after which the adhesive has also penetrated into the cutouts (16, 17) due to capillary effects and has sealed said cutouts, is cured by being exposed. The sealing is performed in an N2 atmosphere. The oscillating chamber (5) is evacuated in advance. IMAGE