A ferromagnetic resonance measuring cavity resonator (10) comprises a cavity resonator (12) having a cavity (16) formed by a side wall (14). The side wall (14) is provided with an input/output hole (18) and a through-hole (20). A ferromagnetic plate (22) provided with a through-hole (24) is mounted on the outside surface of the side wall (14) such that the two through-holes (20,24) are aligned. A wafer specimen is pressed against the ferromagnetic plate (22) to face the through-hole (24). When microwaves are introduced into the cavity resonator (12), ferromagnetic resonance takes place based on the static magnetic field applied to the wafer specimen (26) and the microwaves. As a result, a ferromagnetic resonance signal is detected via the input/output hole (18).
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