MICROVALVE AND METHOD OF MANUFACTURING THE SAME, MICROPUMP USING THE MICROVALVE AND METHOD OF MANUFACTURING THE SAME, AND APPARATUS USING THE MICROPUMP

摘要

A microvalve is equipped with an elastic diaphragm that moves vertically by change in pressure, a support substrate that supports said elastic diaphragm, a holding substrate that holds said support substrate, and a valve protrusion provided on said elastic diaphragm or holding substrate, is equipped with a valve seal part that performs control of fluid, being equipped with, when in a stationary state, a structure that is provided with a gap between said valve seal part and elastic diaphragm, or, a structure in which the width of the contact part between said valve seal part, and the holding substrate or the elastic diaphragm, is equal to or less than 50 µm, and the microvalve fabrication method, and a micropump that uses the microvalve and its fabrication method, and a device that uses the micropump, are presented.