Process for fabrication of integrated optical elements by ion exchange with grating mask for planar optical waveguide

摘要

The manufacturing method forms integrated optical components with strip waveguides and a layer waveguide. A mask (4) with a grid structure serves to generate the layer waveguide by ion exchange. Preferably the method is used to manufacture components with at least four strip waveguides and a free space formed as a layer waveguide. The strip waveguides open into the free space. Ion exchange is carried out using a mask (4). The mask has a strip structure in the region of the free space. Preferably a substrate material of glass is used. Between the ends of the mask openings there may be at least one circle with a diameter of more than four times the width of the mask openings.