Structure of scanning electron microscope with wide resolution area

摘要

Field of the Invention [0002] The present invention relates to a scanning microscope, and more particularly, to a structure of an optical microscope having a wide resolution area so as to have excellent resolving power from low magnification to high magnification.;Conventional scanning microscopes have a problem in that a region irradiated with an electron beam is narrow in a low ratio (x 10 K or less), and observation is difficult (resolution is rapidly decreased).;Disclosure of Invention Technical Problem [8] In order to overcome the above-described problems, the present invention is directed to a scanning electron microscope (SEM) including a columnar electron gun, a magnetic lens and the like, And a scanning electron microscope formed of a column are configured in parallel so that they can be used simultaneously at a high magnification and a low magnification.