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Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
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机译:用于评估扫描电子显微镜的分辨率的样品和方法以及电子扫描显微镜
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摘要
A method of evaluating a resolution of a scanning electron microscope includes picking up a first image of a concave and convex pattern formed on a surface of a sample utilizing a first scanning electron microscope, picking up a second image of the concave and convex pattern on the sample utilizing a second scanning electron microscope, respectively processing the first image and the second image in order to evaluate unevenness in resolution between the first scanning electron microscope and the second scanning electron microscope, and determining whether a height of the concave and convex pattern as measured from a bottom thereof is sufficient so that no affection by a secondary electron emitted from the bottom of the concave and convex pattern is exhibited.
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