Measurement mark for measuring superposition accuracy and optimal focus of exposure equipment

摘要

The present invention provides a box-in-box type inner box pattern (3) and outer box pattern (1); And bar patterns (2,4) formed along at least one of the upper, lower, left, and right sides of each of the inner and outer box patterns. It is related to the measurement mark to measure the optimum focusing and overlapping accuracy of the exposure equipment to be inspected before using the exposure equipment. It was made to be.