Mean Grain Size Determination Using Atomic Force Microscopy and Fractal Theory

摘要

The present invention relates to a method for determining the size of the average crystal grains using atomic force microscope and fractal ions, the sample to be measured using an atomic force microscope or similar scanning atomic microscope and the following equation (1) According to distance;G (R) = [z (x, y) -z (x, y)] ² ... (1);After calculating the G (R) value, graph the distance R and the G (R) value and set the distance to the point where the slope becomes horizontal as the average grain size.