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Vertical temperature gradient cooling and vertical bridges capable of applying an axial magnetic field only Compound semiconductor single crystal growth device
Vertical temperature gradient cooling and vertical bridges capable of applying an axial magnetic field only Compound semiconductor single crystal growth device
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机译:只能施加轴向磁场的垂直温度梯度冷却和垂直电桥化合物半导体单晶生长器件
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摘要
The present invention relates to a vertical gradient cooling and vertical bridging only single crystal growth apparatus capable of applying a magnetic field of about 1600 gauss in the direction of a crystal growth axis by installing a ring type electromagnet around a high temperature electric furnace, And the inner surface of the inner circumferential surface is coated with a gold foil film, and a cylindrical insulating blanket or protection is provided between the hot wire and the double tube so as to primarily absorb the infrared rays emitted from the hot wire inside. A quartz tube is installed so that the magnetic field of the electromagnet is effectively applied to grow a low-defect, large-diameter gallium arsenide single crystal.
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