首页> 外国专利> Vertical temperature gradient cooling and vertical bridges capable of applying an axial magnetic field only Compound semiconductor single crystal growth device

Vertical temperature gradient cooling and vertical bridges capable of applying an axial magnetic field only Compound semiconductor single crystal growth device

机译:只能施加轴向磁场的垂直温度梯度冷却和垂直电桥化合物半导体单晶生长器件

摘要

The present invention relates to a vertical gradient cooling and vertical bridging only single crystal growth apparatus capable of applying a magnetic field of about 1600 gauss in the direction of a crystal growth axis by installing a ring type electromagnet around a high temperature electric furnace, And the inner surface of the inner circumferential surface is coated with a gold foil film, and a cylindrical insulating blanket or protection is provided between the hot wire and the double tube so as to primarily absorb the infrared rays emitted from the hot wire inside. A quartz tube is installed so that the magnetic field of the electromagnet is effectively applied to grow a low-defect, large-diameter gallium arsenide single crystal.
机译:本发明涉及一种垂直梯度冷却和垂直桥接的单晶生长设备,该设备能够通过在高温电炉周围安装环形电磁体而在晶体生长轴方向上施加约1600高斯的磁场,并且内周面的内表面覆盖有金箔膜,并且在热线和双管之间设置有圆柱形的绝缘毯或保护层,以主要吸收从热线内部发出的红外线。安装石英管,以便有效地施加电磁体的磁场,以生长出低缺陷,大直径的砷化镓单晶。

著录项

  • 公开/公告号KR970054336A

    专利类型

  • 公开/公告日1997-07-31

    原文格式PDF

  • 申请/专利权人 김은영;

    申请/专利号KR19950051993

  • 发明设计人 박용주;민석기;

    申请日1995-12-19

  • 分类号H01L29/49;

  • 国家 KR

  • 入库时间 2022-08-22 03:16:39

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