首页> 外国专利> A VERTICAL GRADIENT FREE APPLIED BY AN AXIAL MAGNETIC FIELD AND A VERTICAL BRIDGMAN COMPOUND SEMICONDUCTOR SINGLE CRYSTAL GROWTH APPARATUS

A VERTICAL GRADIENT FREE APPLIED BY AN AXIAL MAGNETIC FIELD AND A VERTICAL BRIDGMAN COMPOUND SEMICONDUCTOR SINGLE CRYSTAL GROWTH APPARATUS

机译:轴向磁场和垂直布里奇曼复合半导体单晶生长装置施加的垂直梯度自由度

摘要

The present invention is a single crystal growth apparatus of vertical temperature gradient cooling and vertical bridging method that can apply a magnetic field of about 1600 gauss in the direction of crystal growth axis by installing a ring-shaped electromagnet around a high-temperature electric furnace, and changes in temperature gradient sensitive to crystal growth. In addition to forming a double tube through which the cooling water circulates inside the high-temperature electric furnace, a gold thin film is coated on the inner circumferential surface thereof, and a cylindrical insulation blanket or protection between the heating wire and the double tube is primarily used to absorb infrared rays emitted from the heating wire. By installing a quartz tube to effectively apply the magnetic field of the electromagnet, it is possible to grow a low defect, large diameter gallium arsenide single crystal.
机译:本发明是一种垂直温度梯度冷却和垂直桥接方法的单晶生长设备,通过在高温电炉周围安装环形电磁体,可以在晶体生长轴方向施加约1600高斯的磁场,温度梯度的变化对晶体的生长敏感。除了形成使冷却水在高温电炉内循环的双管外,在其内周面上还涂有金薄膜,在加热丝和双管之间设有圆筒形的绝缘毯或保护层。主要用于吸收电热丝发出的红外线。通过安装石英管以有效地施加电磁体的磁场,可以生长出低缺陷,大直径的砷化镓单晶。

著录项

  • 公开/公告号KR0176328B1

    专利类型

  • 公开/公告日1999-03-20

    原文格式PDF

  • 申请/专利权人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY;

    申请/专利号KR19950051993

  • 发明设计人 박용주;민석기;

    申请日1995-12-19

  • 分类号H01L29/49;

  • 国家 KR

  • 入库时间 2022-08-22 02:16:16

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