Vertical Cavity Surface Emitting Laser with Distributed Bragg Reflector for Visible Light

摘要

An apparatus and method for manufacturing a vertical cavity surface emitting laser (101) are provided. The vertical cavity surface emitting laser includes a semiconductor substrate (102) having a first surface (105) on which a first set of distributed Bragg reflectors are deposited. The distributed Bragg reflector 103 is fabricated with a conversion layer of indium aluminum gallium phosphide and aluminum arsenide. The effective region 106 is deposited on a distributed Bragg reflector with a cladding region 107 that is different from the subsequent water in the effective region 106. Another distributed Bragg reflector 103 is deposited on the cladding region 107.