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process for the production of semiconductor devices in cmos technology with local interconnects.
process for the production of semiconductor devices in cmos technology with local interconnects.
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机译:具有本地互连的cmos技术中的半导体器件生产工艺。
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摘要
A method of fabricating CMOS devices with local interconnects is disclosed which is performed in two stages. In the first stage, a SALICIDE process is carried out, and in the second stage, the local interconnects are formed.
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