Teaching method and teaching system for a bonding coordinate

摘要

A system for teaching bonding coordinates of pads provided on a semiconductor chip including: a first arithmetic control unit for processing images of pads obtained by a camera and calculates the amount of shift of centers of the images of the pads; and a second arithmetic control unit which, for the first and second pads, corrects the bonding coordinates, thus producing new bonding coordinates for the first and second pads, and for the third and subsequent pads, the second arithmetic control unit moves the camera a distance between new coordinates of two preceding pads and corrects the coordinates of the moved camera, producing new bonding coordinates to be stored in a bonding coordinate memory.