Image recognition apparatus capable of inspecting height and method for inspecting height by using two slit incident beams of light

摘要

An image recognition apparatus with which rapid height discrimination can be performed for a large number of small protrudent objects disposed on a substrate, and further a height inspecting method with the use of the image recognition apparatus, are disclosed. Two slit incident beams having been emitted from an illuminant and passed through slits fall on an object to be inspected each at an incident angle from the direction perpendicular to the surface of the object to be inspected. There are irregularities of objects to be detected on the object to be inspected. The slit beams are intercepted by protrudent parts of the objects to be detected, so that the morphologies of bright lines produced on the surface of the object to be inspected are changed depending on the heights of the objects to be detected. An image of the bright lines is picked up by a television camera, and the resultant signal is compared with an image signal previously stored. Thus, whether or not the heights of the objects to be detected fall within a given range can be discriminated.