Semiconductor optical device with mesa structure which is surrounded laterally by insulating mask for preventing current from leaking directly from cladding layer to substrate and process of fabrication thereof

摘要

A semiconductor mesa structure including active, absorbing, or passive guide layer is surrounding laterally by insulating mask, and is buried by a cladding layer which extends over the insulating mask, and injected current flows through the cladding layer into the mesa structure without leakage from the cladding layer into a substrate so that the semiconductor optical device is improved in performance.