This invention relates to electron emitting semiconductor materials for use in dynodes, dynode devices incorporating such materials, and methods of making the dynode devices. In particular, the invention relates to emissive materials having an electron affinity that is negative and which have low resistivity. The invention also relates to electronic devices such as electron multipliers, ion detectors, and photomultiplier tubes incorporating the dynodes comprising the materials, and to methods for fabricating the electronic devices. The secondary electron emitters of the present invention comprise wide bandgap semiconductor films selected from diamond, AlN, BN, Ga.sub.1-y Al.sub.y N where 0≦y≦1 and (AlN).sub.x (SiC).sub.1-x where 0.2≦ x≦1. The films are preferably single crystal or polycrystalline. The films may be continuous or patterned.
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机译:本发明涉及用于倍增极的电子发射半导体材料,结合这种材料的倍增极器件以及制造倍增极器件的方法。特别地,本发明涉及具有负的电子亲和力并且具有低电阻率的发光材料。本发明还涉及电子器件,例如结合有包含该材料的倍增极的电子倍增器,离子检测器和光电倍增管,以及涉及用于制造电子器件的方法。本发明的二次电子发射体包括选自金刚石,AlN,BN,Ga 1-y Al y N N的宽带隙半导体膜,其中0-1e; y≦ 1和(AlN)x(SiC ).sub.1-x其中0.2≦ x≦ 1。膜优选是单晶或多晶的。膜可以是连续的或图案化的。
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